JPH0318434B2 - - Google Patents

Info

Publication number
JPH0318434B2
JPH0318434B2 JP59004151A JP415184A JPH0318434B2 JP H0318434 B2 JPH0318434 B2 JP H0318434B2 JP 59004151 A JP59004151 A JP 59004151A JP 415184 A JP415184 A JP 415184A JP H0318434 B2 JPH0318434 B2 JP H0318434B2
Authority
JP
Japan
Prior art keywords
piezoelectric
piezoelectric element
wall
bodies
element portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59004151A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60148389A (ja
Inventor
Takashi Takada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP59004151A priority Critical patent/JPS60148389A/ja
Publication of JPS60148389A publication Critical patent/JPS60148389A/ja
Publication of JPH0318434B2 publication Critical patent/JPH0318434B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/023Inchworm motors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/206Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP59004151A 1984-01-11 1984-01-11 圧電体を用いる駆動装置 Granted JPS60148389A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59004151A JPS60148389A (ja) 1984-01-11 1984-01-11 圧電体を用いる駆動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59004151A JPS60148389A (ja) 1984-01-11 1984-01-11 圧電体を用いる駆動装置

Publications (2)

Publication Number Publication Date
JPS60148389A JPS60148389A (ja) 1985-08-05
JPH0318434B2 true JPH0318434B2 (en]) 1991-03-12

Family

ID=11576759

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59004151A Granted JPS60148389A (ja) 1984-01-11 1984-01-11 圧電体を用いる駆動装置

Country Status (1)

Country Link
JP (1) JPS60148389A (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3933296C2 (de) * 1988-12-28 1994-06-01 Prima Meat Packers Ltd Mikromanipulator
US5260622A (en) * 1989-03-24 1993-11-09 Topometrix Corporation High resolution electromechanical translation device
US5268611A (en) * 1992-03-16 1993-12-07 Rockwell International Corporation Anisotropic transducer
FR2800028B1 (fr) 1999-10-21 2002-01-18 Sfim Ind Actionneur a piston actif

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS542691A (en) * 1977-06-08 1979-01-10 Hitachi Ltd Sample fine-adjustment equipment of electrostrictive driving type

Also Published As

Publication number Publication date
JPS60148389A (ja) 1985-08-05

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